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Fundamentals of microfabrication : the science of miniaturization / Marc J. Madou.
Material type:
TextLanguage: English Publisher: Boca Raton : CRC Press, cop. 2002Edition: 2. edDescription: 723 s. illISBN: - 0849308267
- Mikroelektronik
- Integrerade kretsar
- Nanoteknik
- Design
- Microelectronics
- Machining
- Microelectronic packaging
- Integrated circuits -- Design and construction
- Microelectromechanical systems -- Design and construction
- Lasers -- Industrial applications
- Integrerade kretsar
- Mikroelektronik
- Nanoteknik
- Nanotechnology
- Integrated circuits
- Microelectronics
- Design
- Microelectronics
- Integrated circuits
- Nanotechnology
- 621.3815 21
| Item type | Current library | Call number | Status | Barcode | |
|---|---|---|---|---|---|
| Book | Högskolan Väst Övre plan / Upper floor | 621.3815 Madou | Available | 6004300011247 |
Total holds: 0
Includes bibliographical references and index