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Nanofabrication [electronic resource] : Principles, Capabilities and Limits / by Zheng Cui.

By: Contributor(s): Material type: TextTextPublisher: Cham : Springer International Publishing : Imprint: Springer, 2017Edition: 2nd ed. 2017Description: XVII, 432 p. 316 illus., 50 illus. in color. online resourceContent type:
  • text
Media type:
  • computer
Carrier type:
  • online resource
ISBN:
  • 9783319393612
Subject(s): Additional physical formats: Printed edition:: No titleDDC classification:
  • 620.5 23
Online resources:
Contents:
1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.
In: Springer eBooksSummary: This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.
No physical items for this record

1. Introduction -- 2. Nanofabrication by Photons -- 3. Nanofabrication by Electron Beam -- 4. Nanofabrication by Ion Beam -- 5. Nanofabrication by Scanning Probes -- 6. Nanofabrication by Replication -- 7. Nanoscale Pattern Transfer by Etching -- 8. Nanoscale Pattern Transfer by Deposition -- 9. Indirect Nanofabrication -- 10. Nanofabrication by Self-Assembly -- 11. Applications of Nanofabrication Technologies.

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.